Hefei Xinyihua completes 12inch semiconductor AMHS system development and technical specifications verification

China Net, July 13th, it is reported that the overall solution of pan -semiconductor intelligent manufacturing, supplier, Hefei Xinyi Huahua Intelligent Machinery Co., Ltd. (hereinafter referred to as "Hefei Xinyihua") has completed the 12In Semiconductor automatic material moving system AMHS (Automatic Material The development and DEMO system operation of Handling System, and passed the technical specifications verification.

Chip manufacturing has high requirements for process and environment -advanced 12ICH semiconductor factory requires a dust -free and clean environment, and has high requirements for the automation and intelligence of the entire factory operation. The idle time, improvement of production efficiency and product yield of the machine have become the most concerned issue. The AMHS system of the 12ICH semiconductor manufacturing plant consists of a variety of hardware devices (OHT, OHB, OHCV, Stocker, Lifter, NTB, etc.) and software systems (MCS, OCS, STKC, etc.). The AMHS system can achieve unmanned automatic transfer between complex processes in a clean environment to improve operating efficiency while ensuring quality and yield. Therefore, the AMHS system is a large -scale mass production of the 12INCH advanced craft wafer plant, which is a priority choice for improving production efficiency. With the development of industry technology, AMHS will also be widely used in various semiconductor manufacturing processes such as 12inch silicon wafers, chip manufacturing, and advanced packaging.

Hefei Xinyihua AMHS system's transfer efficiency, wafer protection, action accuracy and other performance indicators have reached the international advanced level, and it has a unique path search algorithm patent, and has the ability to intelligently dispatch large -scale vehicles. Among them, the self -developed high -speed OHT products, technical specifications and trust reaching the industry's leading level, can run smoothly under the high -speed driving of up to 320m/min. At the same time The top supplier of the shoulder industry. Hefei Xinyihua OHT has a maximum load of 15 kg, which can correspond to a variety of manufacturing processes, and it has the ability to control 200 vene in single LOOP at the same time.

"We have built a huge AMHS DEMO system covering an area of ​​400 square meters and a hundred meters of orbit. The products have advanced technology and rapid iteration capabilities. OHT designed OHT design A variety of complex track environments, including direct rails, turns, divergence, etc., further designed and verify the tilted track climbing function, double -layer track, rail self -cleaning function, and the rear cover of the wafer box during the transfer. Function, etc., we also conducted redundant design of the wireless power supply system of the core product, and automatically switched the dual -machine thermal designs of the server of the software system, which greatly increased the trust of the system. In terms of software, OCS control system and MCS system Using the new software architecture, it supports the rapid collection and analysis of massive large data, and supports non -stop update. Its system has innovative functions such as real -time data management and statistics, scenario 3D reproduction, Vehicle appointment, FDC monitoring, and dynamic update of path planning algorithms. "Hefei Xinyihua AMHS product leader introduced," Customers are very concerned about the corresponding capabilities of our system under large -scale production manufacturing. To this end, we have specially set up the Digital Twin platform. , Can also build the same digital virtual factories as customer factories, simulation equipment, systems, and real manufacturing environments to verify super -large -scale control capabilities. We provide a high -profile, efficient 12inch wafer AMHS system overall solution It is understood that the development team has more than 15 years of AMHS experience and deeply understands the application and product technology of semiconductor AMHS products. At present, it has applied for patents and softened.

Hefei Xinyihua has a comprehensive manufacturing quality and supply chain system. In the face of the quality and delivery needs of the semiconductor industry, the high -cleaning workshop for more than 4,000 square meters of AMHS system has been fully prepared for mass production. Provide customers with the highest quality products, the most suitable customized system solutions, a competitive delivery cycle, and a rapidly responding to localized services. Hefei Xinyihua uses the industry to report the country as the ambition, always upholding the respect of core technology and insistence on innovation. Adhering to the concept of product vitality is the concept of product vitality. It is believed that only to develop innovative technology and platforms and provide high -quality products and services can we provide customers for customers. Create greater value and develop a faster development of the Chinese semiconductor industry.

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