Electronic special gases to improve domestic enterprises are trying to fill the gap

With the development of emerging industries, gas has been widely used in the production process of integrated circuits, display panels, photovoltaic, and fiber optic cable industries, and such gases have become "electronic special gases". Recently, in the context of the continued context of Russia and Ukraine, special gas has received widespread attention from the market.

Author: Li Jingheng

Figure: Tuwa Creative

Recently, in the context of the continued context of Russia and Ukraine, special gas has received widespread attention from the market.

According to CCTV reports, the Russian Ministry of Industry and Trade said on June 2 that Russia will restrict the exports of inert gas such as pheasant at the end of 2022. An inert gas is also called rare gases, including signs of gaseous gas, qi, qi, qi, qi, qi, and signs, which can be applied to semiconductor manufacturing industries. For example, in the chip's lithography process, the mixture of rare gases will generate a fixed wavelength light after high voltage and the light carvings for wafers.

Companies that produce inertia gas in China include Walter Gas (688268.SH), Jinhong Gas (688106.SH), Kami Special Gas (002549.SZ) and so on. The secretary of the board of directors of Jin Hong Gas recently told the Economic Observation Network that the chip manufacturing process must go through some gaseous processes, which requires a total of dozens of or even hundreds of various types of gases, including rare gases. At present, the rare gas market is better and the price has been rising. The company is focusing on its layout, and its production capacity will double in the next two years.

On June 5, Zhejiang Business Securities analysts Wang Huajun and Zhang Yang said in the research report that Russia accounted for about 30%of global inert gas supply, and Russia's export restrictions may exacerbate the tight supply of the global chip market. In addition, Ukraine was also one of the world's largest inert gas suppliers, with about 45%to 54%of semiconductor -grade grid -grade gas factory from Ukraine's inert gas factories in Mary Ubol and Odeza. After the Russian and Ukraine War, the two factories closed the business, which meant that the global capacity capacity was suddenly lost by half, causing the price of global gaseous and radon to jump.

As of June 14, according to the data of Zhuochuang Information, the market price range of the sacrum is 12,500 yuan to 16,000 yuan per cubic meter, and the price range at the beginning of the year is 1700 yuan to 2,000 yuan per cubic meter. 49,000 yuan to 52,000 yuan per cubic meter, and the price range at the beginning of the year is 20,000 yuan to 22,000 yuan; the price range of the sacrum is 490,000 yuan to 52,000 yuan per cubic meter, and the price range at the beginning of the year is 230,000 to 26,000 to 26,000 Yuan.

In fact, the application of gas in the industry is widely used. For example, according to the Walter Gas Annual Report, ordinary industrial gas products are mainly oxygen, nitrogen, and mirror. Among them, oxygen is mainly used as an oxidant in the chemical industry of metal smelting and other industries; nitrogen is mainly used as a furnace temperature annealing in furnace temperature in industries such as chemical industry, machinery manufacturing, home appliances and other industries; For the protective gas of the arc welding, the filling of the optical tube, etc.

With the development of emerging industries, gas has been widely used in the production process of integrated circuits, display panels, photovoltaic, and fiber optic cable industries, and such gases have become "electronic special gases". Kami Specials said in the annual report that electronic special gas is the "blood" of the semiconductor industry.

The importance of special gas is increasing

Jin Hong gas told reporters that the gas produced by the company can be roughly divided into large gas and special gas. Compared to the bulk gas, the amount of special gas required in the chip production process is not particularly large, but there are many types. In fact, in the entire production process of the chip, many process links need gas, which requires a total of dozens or even hundreds of various types of gases.

The bulk gas produced by Jinhong Gas includes nitrogen, hydrogen, oxygen, etc. Special gas includes ultra -pure ammonia, high -purity oxide nitrogen, eight -fluorine butthlate, orthopedic silicate ethyl, and high -pure carbon dioxide. In fact, special gases and electronic gases are indispensable raw materials for the semiconductor industry.

Walter Gas also introduced in the annual report that industrial gases can be divided into two types: bulk gas and special gas according to their dosage. ) Common gas (hydrogen, carbon monoxide, acetylene, etc.), special gas can be divided into electronic special gas, medical and health gas, food and beverage gas, aerospace gas, etc. according to different uses.

Among them, electronic special gas (referred to as "electronic special gas") refers to a special gas used for semiconductor, display panel, photovoltaic, LED and other electronic products. According to the "2021 China Special Gas Industry Short Report" released by Shenzhen Yidu Data Technology Co., Ltd., China's special gas market size is expected to reach 34.2 billion yuan in 2021, of which electronic special energy is expected to reach 21.6 billion yuan, electronic special gas accounts for accounting Nearly 60 % of special gas.

"Electronic special depth participation in chips, display panels, photovoltaic, LEDs and other core processes often have the effect of 'led the whole body'." Walter gas said.

Jin Hong gas people told reporters that the corresponding gas dosage and variety will be different from the different processes and processes and processes of the chip. The inert gas that everyone is concerned about during this time is also called rare gases, and it is also used in chip manufacturing links.

Walter Gas introduced in the annual report that in the cleaning and etching process of chip products, fluorocarbon products are needed, including high -pure tetrafluoride, high -pure hexarofluoride, eight fluorine, high -pure carbon dioxide, etc. ; In the optical carvings process, the light carvings are needed (mixed gas of rare gases), including mixed gas and fluorine mixed gas. In addition, different types of electronic specialties are needed to use different types of electronic specialty in the process of extension, sedimentation, and ion injection of chips. According to Walter gas statistics, semiconductor wafer manufacturing accounts for about 70%of the electronic special application, followed by about 20%of the panel display market, and the remaining parts include fiber communication, solar cells and other fields.

Walter Gas said that with the accelerated expansion of the global wafer fab and the gradual release of production capacity, the downstream market has a broad demand for electronic special energy, and the market space of electronic special energy continues to expand. Moreover, the rapid development of downstream industries not only increases the demand for special gas in scale. Industrial innovation and technological iterative new processes, new products, etc. have further expanded the application field of special gas, and constantly generate new special gas products demand for demand for demand for new special gas products. Essence

Jin Hong gas told reporters that the company's rare gas accounts for income. Because the market is better, Jin Hong gas is currently focusing on the layout. In the planning of the next year, the output of the salamander will double the increase. Glutiny is often extracted from natural gas, and the company purchases one -handed sacral production resources from overseas.

According to the annual report of Jin Hongqi, the company's gas output in 2021 was 243,400 tons, a year -on -year decrease of 13.21%; special gas output was 72,400 tons, an increase of 297,800 tons year -on -year. Among them, the gross margin of the Grand Gas was 27.21%and the gross margin of special gas was 35.46%.

Jin Hong Gas said that according to industry experience data, the growth rate of industrial gas industry is 2 to 2.5 times that of global GDP growth. Traditionally, large steel smelting and chemical companies often build air separation devices to meet their own gas needs. With the rapid development of specialized division of labor, outsourcing gas suppliers can meet customers with different needs such as gas types, purity and pressure, and provide them with comprehensive gas solutions, which will help reduce customers' huge investment in equipment, technology, and research and development Essence In 2019, China's industrial gas outsourcing rate is about 55%, and by 2020, it will be 57%, and there is still a large gap compared to the 80%outsourcing rate of 80%of developed countries.

The purity requirements are approaching the extreme domestic replacement

Jin Hong gas people introduced to reporters that chip manufacturing usually has high requirements for gas purity. Many products produced by the company have reached 9N purity. This N represents the number of 9 in the purity, such as 5N represents 99.999%of the purity. Different products need different purity, ultra -pure ammonia can reach 7n, and high -purity oxide nitrogen is 5N (also known as "laughing").

Jin Hong gas also stated in the annual report that the semiconductor industry has harsh requirements for gas sources and its supply system. The in -depth purity of electronic gas is difficult, and purity is the most important indicator of gas quality. During the chip processing process, the difference in purity of the tiny gas will lead to the reduction of the performance of the entire product or even scrap.

According to Jin Hong gas, the purity of electronic gas often requires a level of 5N or higher. In addition, it is necessary to purify the negative 9th level of the metal element impurities in the gas in the gas in the gas in the gas in the gas. Each level of gas purification is raised to make higher requirements for purification technology, and the technical difficulty will also increase significantly.

Walter Gas also stated in the annual report that gas purity is the core parameter of special gas products, which requires super pure and super -net. Among them, the purity of super pure gas reaches 4.5N, 5N, and even 6N, and 7N. The super -net requirements strictly control the content of particles and metal impurities. The concentration of the concentration of the purity of the particle and the metal impurities of particles and metal impurities will bring the process. The complexity and difficulty are significantly improved.

With the improvement of gas purity, units that detect trace impurities are getting smaller and smaller. Jin Hong gas people told reporters that the concentration unit that measures trace gas can be represented by PPM, PPB, PPT and other units. Among them, PPM represents the negative 6 level level of 10, PPB represents the negative 9 level level of 10, PPT represents 10 of 10 Negative 12th level.

According to the Jin Hongqi Sports Annual Report, with the increasing requirements of emerging industries for industrial gas purity, the detection and analysis technology of impurities in the gas in the gas is also stricter. From the early constants to PPT level.

Walter Gas also stated that in the process of preparing mixed gas, as the product component increases and the formulation accuracy increases, gas suppliers are often required to finely operate the gas groups of multiple PPM and even PPB -level concentrations, and their preparation can be prepared to prepare for their preparation. The difficulty and complexity of the process have also increased significantly.

Walter gas further stated that the technology of the integrated circuit field is rapidly changing. The wafer size has grown from 6 inches and 8 inches to 12 inches, and process technology ranges from 28nm, 14nm, 7nm to 5nm. As the key material of the integrated circuit industry, the degree of refinement of special gas has also continued to improve, and the technical requirements for special gas production enterprises in terms of gas purity and mixed accuracy will continue to improve.

However, Kami Specials introduced in the annual report that at present the domestic electronic specialized market, especially high -end electronic special domestic self -sufficiency rate, is very low, and more than 80%of China's electronic special gas rely on imports. "In February 2022, the Russian -Ukraine conflict brought major uncertainty to the supply of rare gases. The supply of supply was tight, the price soared, and a negative impact on supply safety. Development is a new situation facing the company. "Walter gas said.

However, domestic special gas manufacturers are gradually filling the gap. According to Walter Gas, the company has gradually realized the import substitution of nearly 20 products such as high -purity hexarial ethylene, high -pure triaxide, and photoresmal gas. Moreover, the 4 types of lithography and production produced by Walter Gas have obtained the certification of Asmore (ASML) and Japan's Gigaphotonr in 2017 and 2021, respectively. Gas Company certified by the optical carved manufacturer.

At present, some products of Walter Gas have supplied 14nm and 7nm and other production lines, and some fluorocarbon products have entered a process of 5nm. "Objectively, domestic special gases began to gradually have the ability to replace imports, and the market demand for domestic replacement imports in the future is broad." Walter gas said.

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