Domestic lithography machine past: Difficulty, really difficult ...

Breakthroughs and changes are happening.

Wen | Chinese Business Tao Li Mu Bai

When the Chinese generally sighed at the light carved machine, Peter Winning, the leader of the global light carving machine ASML, said:

"If the light carved machine is not sold to China, within five years, they will master all EUV light carved technology. Fifteen years later, ASML will lose the right to speak in the industry!"

Can we do it?

【1】 Hard start

In 1956, Premier Zhou Enlai received a draft of six million words. In this "Twelve Years of Science and Technology Development Vision Plan", members of the Academic Department of the Chinese Academy of Sciences proposed 57 key development tasks.

Looking at the thick information, Premier Zhou asked the experts: "So many key points, what should the State Council take?"

In the end, 57 tasks were condensed into four major emergency measures: computing technology, radio electronics, automatic learning and long -distance manipulation technology, and semiconductor technology.

New China's emphasis on semiconductors is indeed not too late. Two years later, Kirby, Texas Instruments, and Neisus of Fairy Semiconductor, did the first integrated circuit in human history at the same time and opened the Pandora Box.

As a must -have device manufactured by integrated circuits (chips), the light carved machine has since embarked on the stage of history and entered the fast track of development. The development of Chinese light engraved machines starts from this time.

In 1961, the US GCA company created the first contact light carving machine. And a widely circulated statement is that in 1966, the 109 factory under the Chinese Academy of Sciences collaborated with the Shanghai Optical Instrument Factory and successfully developed my country's first 65 -type contact light carved machine.

The complexity of the early light carvings was similar to the camera, and the technical difficulty was not high, so everyone's gap was not so large.

The rapid development of the semiconductor market promotes the demand and growth of the light carved machine. Japan's Canon, Nikon, GCA in the United States, and Perkin Elmer, which accepts military investment, have begun to enter this field. Although China is relatively backward, it has also followed the pace of the industry for a long time.

Even in the turbulent era, China is still inauguration with the light carved industry, although this process is full of hardships.

In 1971, Xu Duanyi, who was studying rice planting on the shores of Poyang Lake, Jiangxi, suddenly received a call from Beijing. He was originally a teacher at the Department of Precision Instrument Department of Tsinghua University.

Tsinghua University has a team of hundreds of people for Xu Duanyi, with superior technical fitters, precision machinery processing, and teachers and technical workers who control computer control from other units. Qunxian has been completed, but none of them have engraved the light engraving machine.

It was somewhat helpless to form such a "grass platform" team.

Not long after the founding of New China, 17 countries including the United States, the United Kingdom, and Japan have engaged in a Paris Paris Coordination Committee (referred to as Badong), which aims to restrict member states to export strategic materials and high -tech to socialist countries. The list includes military weapons and equipment, cutting -edge technology products, and China is also being banned.

With the vigorous development of semiconductors, the light carvings are also listed as cutting -edge products by Badong, and they are embarked on China. There are few professionals in China who are engaged in the light carved machine, which can only transfer troops from related disciplines.

The foundation is thin, the foundation is poor, and the shackles such as "Badong" are inevitable.

In 1973, Perkinelmer, the United States launched the first scanned projection light carved machine, which has high accuracy of the optical carved machine, which has changed the technical route that presses the light mold on the lithography glue. The yield of chip production is between 10%overnight and overnight Raise to 70%. But domestic stay in the era of contact -type lithography machine.

Being behind will be beaten, deeply engraved in the mark of a generation, and the Chinese determination to get up.

In 1977, in Wu County, Jiangsu (now Wuzhong District, Suzhou), a seminar was specially held. The 67 representatives attended the meeting pointed out that the optical carved equipment and craftsmanship were extremely important. Semiconductor equipment overtakes the world's advanced level.

Human potential has played to the extreme in the first -generation photocriis practitioners in China.

Without information, he could only explore by himself. The members of the Xu Duanyi team learned and worked overtime day and night. Finally, it created the first domestic projection light carving machine in 1980.

In 1985, the 45s of the Chinese Academy of Sciences made significant progress in the field of light engraving machines. The development of step -by -step projection light carvings was developed, and it was identified as the level of light carvings launched by the US GCA company in 1978. At that time, ASML, a light carving giant in the future, was just born.

There is a good starting point for the domestic light carved machine, but it is embarrassing because the overall domestic semiconductor industry was too weak at that time. Although the domestic light carving machine has been developed, there is no good downstream application market. It cannot really embark on the road of market and commercialization. It can only stay in the laboratory research stage.

In the following two or three decades, this reality has intensified, and the gap between the Chinese light engraved machine has become increasingly larger.

【2】

In July 1977, Deng Xiaoping invited 30 representatives of the scientific and technological circles to hold a symposium in the Great Hall of the People.

At that seminar, Wang Shouwu, a Chinese semiconductor soul, said very direct:

"There are more than 600 semiconductor production factories in the country. The total amount of integrated circuits produced in one year is only equal to one -tenth of a monthly output of a large factory in Japan."

In a word of Wang Shouwu, the home of the Chinese semiconductor industry shake the home of the semiconductor industry. In the late 1960s, China once used mass movements to engage in semiconductors. At that time, there was even such a report on the newspaper: The old lady in the street could also make a semiconductor in the lord.

It is quite dry, and the development of the industry is violated with scientific laws, and the domestic chip industry is basically decentralized handmade production. During the same period, Japan relied on the "production, official, and learning" cooperation system to become a powerful competitor in the global semiconductor market, and its optical carved technology has made great progress.

In 1984, Nikon launched a mass -produced automated step -by -step light carvings. With good performance, as in the early days of the Pacific War, the "Made In Japan" light carved machine was printed, which defeated American manufacturers. Nikon even won a series of major customers such as IBM, Intel, and AMD from American manufacturer GCA.

Between the rise and after the rise, the gap between China and the world's advanced level has been pulled even larger. This gap infected with planners, and the Chinese semiconductor industry began a rapid way of catching up.

From 1986 to 1995, the state ministries and commissions successively organized the "three major campaigns" in the semiconductor field: 531 strategy, 908 project, and project 909. Planning workers hope to go through market -oriented and sporty concentrated ones in exchange for the advancement of semiconductor technology and the development of industrial leapfrogging.

However, the country's in full swing in China has not become a lucky moment for domestic lithography machines.

Reform and opening up, letting the US and suncades staring at the Chinese market, coupled with the performance of the domestic optical carved machine, the demand for semiconductor companies and the market demand of the optical machine in China has become a foreign investment. Gift.

In order to quickly seize the Chinese optical engine market, in addition to conventional competition, international manufacturers can be described as possible. Some companies have even launched special benefits: buying light carved machines and traveling abroad.

As soon as the national gate was opened, the managers of the Chinese factory managers always wanted to go out and play, play, and learn from the advanced experience. In addition, the other party's products are indeed excellent, so domestic companies generally choose foreign lithography machines.

Many companies that originally purchased the Xu Duanyi team projection light carved machine have canceled their orders.

It is backward and there is no domestic lithography machine in the market. At this time, the situation is even more embarrassing. The product cannot be sold. While you ca n’t find money in the market, even the survival is drawn from the bottom of the kettle:

In the early 1980s, my country implemented a policy of "dial -up loans" to change the government's financial allocation of state -owned enterprises to loans from enterprises to banks, resulting in a decrease in the country's investment in the electronic industry.

Not only can win the market, nor does it have national funding support. Therefore, the domestic lithography machine stood on the edge of the cliff, and many optical carved machine projects were running down.

The chip industry is changing with each passing day, as is the light carved machine. When the pace stopped, the domestic photoresistic, which was still struggling, was quickly widening with the international peers, and was almost stagnant.

The Wuhan radio component three factory has been written in the "Manufacturing of the Light Cover Model", and a non -staple food was sold. Xu Duanyi's team also withdrew from the research of the light carved machine, turned to the field of CD -ROM technology, and also won the second prize of the national invention.

[3] Come from scratch

In 2002, Feld Hoffen, a border town in southern Netherlands, came with a group of Chinese people in suits and shoes. They carried a heavy mission on them -the research and development has just been included in the new type of "863 major science and technology research plan". Lithography.

The person who led the team was named He Rongming. The Shanghai Microelectronics Company, which he was at the helm, was led by the Ministry of Science and Technology and the Shanghai Municipal Government to bear the heavy responsibility of tackling the technology.

In 1999, when NATO invaded Kosovo, the electronic information war in the United States paralyzed almost all network communication systems in the South Alliance, allowing people to see the power of an information war. The Ministry of Science and Technology has repeatedly held an emergency meeting discussion: What threat will the national information security will face once the trouble with the United States?

Under the concerns of the lack of core souls, China shouted the slogan of "it is necessary to develop a chip to sell iron to sell iron." With the encouragement of policies, China's semiconductor industry has a wave of returnee entrepreneurship and independent development, and domestic lithography machines have awakened again.

In the year when He Rongming inspected ASML, the international light carved technology technology ushered in a major breakthrough. The new -generation light carving machine successfully developed by the Taiwan Mechanical and Electrical Union ASML promoted the chip process to 45nm. ASML stood out by this and defeated Nikon in the future, becoming a new generation of lithography machine overlords.

He Rongming's goal is very clear. If you want to cooperate with the optical machine giant ASML, you can learn something at least, but the other party did not take this group of guests from China at all.

A German engineer in ASML directly showed them the drawings of the light carved machine and said a ruthless sentence: "Even if you give you a full set of drawings, you can't do the light carved machine."

He Rongming is very angry, but the words of foreign experts are not unreasonable. The manufacturing of the light carvings is too difficult. The accuracy and speed requirements are too high to imagine -equivalent to the two large planes from take -off to landing, and they are always working together. A knife extended on the plane and engraved on the rice grains of another plane.

Although Badong disintegrated, Western countries led by the United States have gained the Venalian Agreement.

Under the Wanshan agreement, Western countries exports to Chinese semiconductor technology and optical machines, which generally follow the principle of "N-2", that is, two generations behind the most advanced technology. If it is appropriately delayed during the approval process, what China can get will be more than three generations. Under the attention of the initiative of the integrated circuit, China must be able to restart the domestic optical carvings -45 of the 45 projection lithography machines, which were transferred to Shanghai Microelectronics. Their task was to be less than 100nm. Research on the engraving.

In 2007, Shanghai Microelectronics announced the development of a distributed projection light carving machine with a 90nm process. Since most of the meta -components of this machine are foreign, Western countries are immediately embodied. The hard -to -develop light carvings have been delayed to mass production.

In 2008, the state established the "Large -scale Integrated Circuit Manufacturing Equipment and Complete Craft Special" (02 Special). After learning from the previous car, in addition to the manufacture of the whole machine, it also supported a number of supporting industrial chain companies.

For example, the Institute of Microelectronics of the Chinese Academy of Sciences and Keyi Hongyuan cooperation to study the light source system, Tsinghua University and Huazhuojian development dual workbench system, Zhejiang University and Qier mechanical and electrical joint development and immersion system.

Under continuous research, the optical engraved industry began to make breakthroughs. In 2016, Shanghai Microelectronics finally achieved mass production of 90nm lithography machines.

In the same year, the team of Tsinghua University and Huazhuo Jingke successfully developed the light carved machine dual -work platform system prototype, becoming the second company to master the light carved dual workbench system after ASML.

However, as the situation continued to improve, the United States wielded a big stick.

In May 2019, the United States suddenly announced sanctions against Huawei and soon expanded sanctions from chips to more fields. The most important of which was to restrict the sales of international leading light engraving machines to China.

【4】 Continuous breakthrough

On June 3, 2019, a Boeing C-32A aircraft landed in Amsterdam, the capital of the Netherlands. The special plane was then a US Secretary of State Pompeo and American politics No. 2.

One of his goals is to prevent a transaction between the Dutch enterprises: a year ago, SMIC spent $ 150 million to buy an EUV light carving machine from the Netherlands ASML company.

The chip wafer less than 5 nanometers can only be produced with an EUV lithography machine. With this light carving machine, SMIC is expected to continue to catch up in the chip process to shorten the gap.

The U.S. government, which has always advocated the market economy and free trade, was simply self -made, put pressure on the Netherlands, and succeeded. Chinese chip manufacturing companies, including SMIC, were stuck in their necks.

On November 9, 2021, at the 3rd Import and Exposition Expo, Shen Bo, deputy president of the global optical engine leader ASML and president of China, told the media that the company was open to China ’s export optical machine.

Now you can stab the honeycomb. Because the United States is trying to ask it for banning products against China, and step by step, not only the EUV lithography machine for advanced processes is required, but also the DUV lithography machine for the sale of mature processes.

At present, the game between the two sides is still going on.

The United States is continuing to pressure, but the ASML of EUV has been banned, and it is obviously unwilling to ban DUV. Its CEO Peter Winningk said, "China is a very important global market supplier, the world 'cannot ignore this reality' ' ","

It is very euphemistic, but the meaning is very clear. "Once the light carving machine is disconnected to China, the global semiconductor market will affect."

Correspondingly, in the first quarter of 2022, ASML delivered a total of 62 light engraved machines, of which 21 DUVs were sold to mainland China.

ASML tends to support China's attitude, not completely from international friendship, but also includes its own huge interests. Because today's China is a market that is unbearable by any global company.

In 2021, my country's integrated circuit output was 359.4 billion yuan, and the integrated circuit of exports was 310.7 billion yuan, an increase of 19.6%year -on -year. Schmidt, a former CEO of Google, even said that by 2025, mainland China may become the world's largest chip production area.

ASML is therefore worried: "If the lithography machine is not sold to China, within five years, we will master all EUV lithography technology. Fifteen years later, ASML will lose the right to speak in the industry!"

But in the final analysis, the core technology still has to be in my hands. At the same time as the United States continued to suppress it, the Chinese light machine also ushered in unprecedented pursuit of unprecedented pursuit.

In October 2019, the second phase of the National Fund was registered and established with a registered capital of 204.15 billion. One of its investment directions was core equipment and key components such as lithography machines.

On August 4, 2020, the State Council issued the "Several Policies to Promote the Integrated Circuit Industry and the Software Industry in the new period", and implemented tariff exemptions to the raw materials required for manufacturing such as imported models such as imported models.

In February 2021, the National Integrated Circuit Standardization Technical Committee was established, including 90 units including Huawei, Xiaomi, SMIC, Shanghai Microelectronics, Peking University, Tsinghua University, which basically covered the main enterprises and scientific research institutes of my country's integrated circuit industry chain, scientific research institutes, and research institutes, and research institutes, scientific research institutes, and research institutes, and research institutes, scientific research institutes, and research institutes, scientific research institutes, and research institutes, scientific research institutes, and scientific research institutions. College. Everyone holds the group to warm up to further promote the docking of the industry.

The domestic optical carving industry also ushered in a breakthrough. Shanghai Microelectronics disclosure: It is expected to deliver the first 28nm craft domestic lithography machine in 2022. Although this is still different from 7nm and 5nm, the gap has been greatly reduced. Recalling the beginning of the founding of New China, one has no funds, two industrial foundations, and no talent reserves. The domestic lithography machine has achieved the advanced level of the world.

At present, national policies continue to work, and related companies are also struggling to break through. What's more important is that the industrial environment is not the same as before. The research foundation, capital strength, and industrial upstream and downstream of domestic optical engine have reached the world level. The achievement of concentrated power has made a successful breakthrough again, and it has reached the critical point.

Before the lithography machine, there were actually many industries in China, such as the panel industry, which was the world of Japanese and Korean companies. There is no technology, and Chinese manufacturers who are in the lower reaches of the industrial chain have to consume huge funds.

With the efforts of panel companies represented by BOE, China has now become the world's largest panel origin. Data show that in the first half of 2022, mainland Chinese panel manufacturers shipped with 84 million pieces and 67%market share, and they were global.

With reference to the panel industry, and even more of the history of China's industry breakout, ASML "may lose the right to speak of the industry", it is not impossible.

【Reference Information】

[1] "China's former Light Carving Machine Research and Development and Xu Duanyi"

[2] "Fifty years of domestic lithography machines, the fire of the stars, can it be alarm? 》 Science and workers

[3] Shanghai State -owned Magazine Shanghai State -owned Magazine

[4] "Bone Bone Bone under the Astrology of the Light Carrier, the White Bone under the Astai Throne" Yuanchuan Science and Technology Review

[5] "1981 Difficulty behind the Chip Manufacturing" Big Power "

[6] "The Breakst and Game of China Chip Industry" Chen Fang and Dong Ruifeng

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